Ti/Au 積層構造有するマイクロカンチレバーの 構造安定性に対する熱処理の影響評価

Publication Information

Title

Japanese:	Ti/Au 積層構造有するマイクロカンチレバーの構造安定性に対する熱処理の影響評価
English:	Evaluation of Relationship between Heat Treatment Temperature and Structural Stability of Micro-cantilevers Possessing Ti/Au Multi-layered Structures

Author

Japanese:	宮井良介, 栗岡智行, Chun-Yi Chen, Tso-Fu Mark Chang, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Ryosuke Miyai, Tomoyuki Kurioka, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:
English:	Proc. The 71st JSAP Spring MeetinProc.

Volume, Number, Page

p. 23a-12K-1

Published date

Mar. 22, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第71回応用物理学会春季学術講演会
English:	The 71st JSAP Spring Meeting 2024

Conference site

Japanese:
English: