MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査

Publication Information

Title

Japanese:	MEMS加速度センサへの応用に向けためっき金の微小圧縮試験によるひずみ速度依存性調査
English:	Investigation of strain rate dependence by micro-compression testing of electrodeposited gold for MEMS accelerometer applications

Author

Japanese:	菅野翔太, 大村太郎, 栗岡智行, Chun-Yi Chen, 町田克之, 伊藤浩之, 三宅美博, Tso-Fu Mark Chang, 曽根正人.
English:	Syota Kanno, Taro Omura, Tomoyuki Kurioka, Chun Yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Tso-Fu Mark Chang, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:
English:	Proc. The 71st JSAP Spring MeetinProc.

Volume, Number, Page

p. 23a-12K-3

Published date

Mar. 22, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第71回応用物理学会春季学術講演会
English:	The 71st JSAP Spring Meeting 2024

Conference site

Japanese:
English: