Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Clarification of Geometric Effects on Long-Term Structural Stability of Ti/Au Multi- Layered Micro-Cantilevers

Author

Language

English

Journal/Book name

Japanese:
English:	Micro and Nano Engineering

Volume, Number, Page

Vol. 23 p. 100244

Published date

Mar. 12, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

https://doi.org/10.1016/j.mne.2024.100244

DOI

https://doi.org/10.1016/j.mne.2024.100244

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