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Title
Japanese:柔軟薄膜の複曲面貼り付けを目指したオーセティックパターンを有する双極型静電吸着デバイスの開発 
English: 
Author
Japanese: 吉本純平, 田岡祐樹, 齋藤滋規.  
English: Jumpei Yoshimoto, Yuki Taoka, Shigeki SAITO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:2024年度精密工学会春季大会学術講演会 
English: 
Conference site
Japanese: 
English: 

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