Home >

news Help

Publication Information


Title
Japanese:Deep-RIEで作製したブラックGeの微細構造側壁のスキャロップ深さと反射率との関係 
English: 
Author
Japanese: 遠西美重, 松下祥子, 松谷晃宏.  
English: Mie Tohnishi, Sachiko Matsushita, Akihiro Matsutani.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 23, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:第71回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京 
English: 

©2007 Institute of Science Tokyo All rights reserved.