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Publication Information
Title
Japanese:
English:
Effect of Strain Rate in Compression Electrodeposited Gold Micro-Pillar toward Design of MEMS Component
Author
Japanese:
菅野翔太
,
大村 太郎
,
栗岡 智行
,
陳 君怡
,
CHAKRABORTY P
,
町田 克之
,
伊藤 浩之
,
三宅 美博
,
曽根 正人
,
Chang Tso-Fu Mark
.
English:
Syota Kanno
,
Taro Omura
,
Tomoyuki Kurioka
,
Chun-Yi Chen
,
Parthojit Chakraborty
,
Katsuyuki Machida
,
Hiroyuki Ito
,
Yoshihiro Miyake
,
Masato Sone
,
Tso-Fu Mark Chang
.
Language
English
Journal/Book name
Japanese:
English:
Micro and Nano Engineering
Volume, Number, Page
Vol. 23 p. 100254
Published date
Apr. 22, 2024
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
Official URL
https://doi.org/10.1016/j.mne.2024.100254
DOI
https://doi.org/10.1016/j.mne.2024.100254
©2007
Institute of Science Tokyo All rights reserved.