Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure  Toward High-sensitive Accelerometers

Publication Information

Title

Japanese:
English:	Thermal Treatment Effects on Warpage of an Octagonal Electrodeposited-Au Proof Mass with a Ti/Au Multi-layered Structure Toward High-sensitive Accelerometers

Author

Japanese:	森達彦, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Tatsuhiko Mori, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Volume, Number, Page

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Conference site

Japanese:
English: