Dependence of Applied Voltage on Effective Young’s Modulus of  Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Publication Information

Title

Japanese:
English:	Dependence of Applied Voltage on Effective Young’s Modulus of Ti/Au Multi-Layered Micro-Cantilevers for MEMS Capacitive Accelerometers

Author

Japanese:	渡邉春海, Shunkai Watanabe, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, TENNETI DEVI, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Syunkai Watanabe, Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Tenneti Devi Srujana, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Volume, Number, Page

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:
English:	50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier)

Conference site

Japanese:
English: