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Title
Japanese: 
English:Suppression of Warpage in Perforated Proof-Mass of Gold Single-Axis MEMS Accelerometers for Micro-g Level Sensing 
Author
Japanese: TENNETI DEVI, 御宿 希祐, 向出 千隼, 山田 虎人, 町田 克之, 栗岡 智行, Chang Tso-Fu Mark, 曽根 正人, 三宅 美博, 伊藤 浩之.  
English: Devi Srujana Tenneti, Kisuke Miyado, Chihaya Mukaide, Torauto Yamada, Katsuyuki Machida, Tomoyuki Kurioka, Tso-Fu Mark Chang, Masato Sone, Yoshihiro Miyake, Hiroyuki Ito.  
Language English 
Journal/Book name
Japanese: 
English:50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 
Volume, Number, Page        
Published date Sept. 16, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:50th International Micro and Nano Engineering Conference (MNE 2024 Montpellier) 
Conference site
Japanese: 
English: 

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