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Title
Japanese:Pt下部電極の膜厚がAlScNの膜特性に及ぼす影響 
English: 
Author
Japanese: 道古宗俊, 松井尚子, 入澤寿和, 恒川孝二, 中村美子, 岡本一輝, 舟窪浩.  
English: 道古宗俊, 松井尚子, 入澤寿和, 恒川孝二, 中村美子, Kazuki Okamoto, HIROSHI FUNAKUBO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Mar. 22, 2024 
Publisher
Japanese: 
English: 
Conference name
Japanese:第71回応用物理学会春季学術講演会 
English: 
Conference site
Japanese:東京都 
English: 

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