High stability of ferroelectricity against hydrogen gas in (Al,Sc)N thin films

Publication Information

Title

Japanese:
English:	High stability of ferroelectricity against hydrogen gas in (Al,Sc)N thin films

Author

Japanese:	Nana SUN, 岡本一輝, 安岡慎之介, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Soshun Doko, 舟窪浩.
English:	Nana SUN, Kazuki Okamoto, Shinnosuke Yasuoka, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Soshun Doko, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 22, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第71回応用物理学会春季学術講演会
English:

Conference site

Japanese:	東京都
English: