高基板温度におけるスパッタ膜形成時の内部応力in-situ観測

Publication Information

Title

Japanese:	高基板温度におけるスパッタ膜形成時の内部応力in-situ観測
English:	In-situ observation of internal stress during sputter-deposition of films on high temperature substrate

Author

Japanese:	中川茂樹, 横澤諒, 飯田大介, 佐々木康宣, 高村陽太, 中光豊, 神保武人.
English:	Shigeki Nakagawa, Ryo Yokozawa, Daisuke Iida, Yasunobu Sasaki, Yota Takamura, Yutaka Nakamitsu, Takehito Jinbo.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

16a-C31-10

Published date

Sept. 16, 2024

Publisher

Japanese:
English:

Conference name

Japanese:	第85回応用物理学会秋期学術講演会
English:	The 85th JSAP Autumn Meeting 2024

Conference site

Japanese:	新潟県新潟市
English:	Niigata, Niigata

Official URL