超臨界二酸化炭素エマルション銅電解めっきの電気化学特性

Publication Information

Title

Japanese:	超臨界二酸化炭素エマルション銅電解めっきの電気化学特性
English:	Electrochemical Properties of Copper Electroplating with Supercritical Carbon Dioxide Emulsion

Author

Japanese:	樋口和人, Tso-Fu Mark Chang, 曽根正人.
English:	Kazuhito Higuchi, Tso-Fu Mark Chang, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:	日本金属学会誌
English:	Journal of the Japan Institute of Metals and Materials

Volume, Number, Page

Published date

Mar. 16, 2025

Publisher

Japanese:	日本金属学会誌
English:	日本金属学会誌

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI