Selective phase growth of ultra-smooth Ti2O3 and TiO2 thin films at low growth temperature controlled by the oxygen partial pressure

Publication Information

Title

Japanese:
English:	Selective phase growth of ultra-smooth Ti2O3 and TiO2 thin films at low growth temperature controlled by the oxygen partial pressure

Author

Japanese:	Jiayi Tang, Okkyun Seo, Jaemyung Kim, Ibrahima Gueye, L. S. R. Kumara, Ho Jun Oh, Wan-Gil Jung, Won-Jin Moon, Yong Tae Kim, Satoshi Yasuno, Tappei Nishihara, 吉本護, 松田晃史, 坂田修身.
English:	Jiayi Tang, Okkyun Seo, Jaemyung Kim, Ibrahima Gueye, L. S. R. Kumara, Ho Jun Oh, Wan-Gil Jung, Won-Jin Moon, Yong Tae Kim, Satoshi Yasuno, Tappei Nishihara, Mamoru Yoshimoto, Akifumi Matsuda, Osami Sakata.

Language

English

Journal/Book name

Japanese:
English:	Applied Surface Science Advances

Volume, Number, Page

Volume 26

Published date

Feb. 8, 2025

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI