微小材料評価技術を用いたMEMS部材の評価

Publication Information

Title

Japanese:	微小材料評価技術を用いたMEMS部材の評価
English:	Material Evaluation of MEMS Components by Micro-material Testing

Author

Japanese:	名越貴志, Tso-Fu Mark Chang, 曽根正人.
English:	Takashi Nagoshi, Tso-Fu Mark Chang, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:	日本金属学会誌
English:	Journal of the Japan Institute of Metals and Materials

Volume, Number, Page

Published date

Mar. 16, 2025

Publisher

Japanese:	日本金属学会誌
English:	日本金属学会誌

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI