微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価

Publication Information

Title

Japanese:	微小圧縮試験による Ti/Au 積層膜上の電解金めっき膜の機械特性評価
English:

Author

Japanese:	飯間翔太, 栗岡智行, 菅野翔太, Chun Yi-Chen, Tso-Fu Mark Chang, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	Shota Iima, Tomoyuki Kurioka, Shota Kanno, Chun Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

Japanese

Journal/Book name

Japanese:	応用物理学会春季学術講演会
English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:

Conference site

Japanese:	千葉
English: