Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications

Publication Information

Title

Japanese:	Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications
English:	Nickel Electroplating Using a Supercritical Carbon Dioxide-Emulsified Nickel Sulfamate Electrolyte toward MEMS Applications

Author

Japanese:	侯文鼎, 栗岡智行, 陳君怡, Chang Tso-Fu Mark, 町田克之, 伊藤浩之, 三宅美博, 曽根正人.
English:	WENDING HOU, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone.

Language

English

Journal/Book name

Japanese:	応用物理学会春季学術講演会
English:

Volume, Number, Page

Published date

Mar. 14, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:

Conference site

Japanese:	千葉
English: