Effects of thickness scaling on switching kinetics in (Al,Sc)N ferroelectric films

Publication Information

Title

Japanese:
English:	Effects of thickness scaling on switching kinetics in (Al,Sc)N ferroelectric films

Author

Japanese:	Nana Sun, 岡本一輝, 道古宗俊, Naoko Matsui, Toshikazu Irisawa, 恒川孝二, 舟窪浩.
English:	Nana Sun, Kazuki Okamoto, Soshun Doko, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

15a-K503-2

Published date

Mar. 15, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第72回応用物理学会春季学術講演会
English:	The 72nd JSAP Spring Meeting

Conference site

Japanese:
English: