Material Control &amp; Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer

Publication Information

Title

Japanese:	Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer
English:	Material Control & Evaluation Methods of Multi-layered Ti/Au Micro-sized Components by Electroplating Toward Ultra High-Sensitive MEMS Accelerometer

Author

Japanese:	曽根正人, Chang Tso-Fu Mark, 栗岡智行, 陳君怡, 町田克之, 伊藤浩之, 三宅美博.
English:	Masato Sone, Tso-Fu Mark Chang, Tomoyuki Kurioka, Chun-yi Chen, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake.

Language

English

Journal/Book name

Japanese:
English:	Material World 2025, 3rd Global Conference on Materials Science & Engineering

Volume, Number, Page

Published date

Apr. 24, 2025

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Material World 2025, 3rd Global Conference on Materials Science & Engineering

Conference site

Japanese:
English:	Dubai