Stable ferroelectric property at high temperature under nydrogen gas in (Al, Sc)N thin films

Publication Information

Title

Japanese:
English:	Stable ferroelectric property at high temperature under nydrogen gas in (Al, Sc)N thin films

Author

Japanese:	Nana Sun, 岡本一輝, Shinnnosuke Yasuoka, 道古宗俊, Naoko Matsui, Toshikazu Irisawa, 恒川孝二, 舟窪浩.
English:	Nana Sun, Kazuki Okamoto, Shinnnosuke Yasuoka, Soshun Doko, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 12, 2025

Publisher

Japanese:
English:

Conference name

Japanese:	第41回強誘電体会議
English:

Conference site

Japanese:	京都市
English: