In-situ TEM Investigation of Structural Evolution of Zirconia High-k Gate Dielectrics at Elevated Temperature

論文・著書情報

タイトル

和文:
英文:	In-situ TEM Investigation of Structural Evolution of Zirconia High-k Gate Dielectrics at Elevated Temperature

著者

和文:	Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani.
英文:	Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani.

言語

English

掲載誌/書名

和文:
英文:	Abstracts of International Conference on Materials for Advanced Technologies & IUMRS-International Conference in Asia 2003

巻, 号, ページ

Vol. N3-3-3 pp. 732

出版年月

2003年12月

出版者

和文:
英文:	Abstracts of International Conference on Materials for Advanced Technologies & IUMRS-International Conference in Asia 2003

会議名称

和文:
英文:	International Conference on Materials for Advanced Technologies & IUMRS-International Conference in Asia 2003

開催地

和文:
英文:	シンガポール