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タイトル
和文: 
英文:Local actuator module for highly accurate micro-EDM 
著者
和文: 今井祥人, 中川孝幸, 三宅英孝, 比田井洋史, 戸倉和.  
英文: Yoshihito Imai, Takayuki Nakagawa, Hidetaka Miyake, Hirofumi Hidai, Hitoshi Tokura.  
言語 English 
掲載誌/書名
和文: 
英文:J. Mat. Processing Technol. 
巻, 号, ページ Vol. 149    No. 1-3    pp. 328–333
出版年月 2004年 
出版者
和文: 
英文: 
会議名称
和文: 
英文: 
開催地
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英文: 
公式リンク http://dx.doi.org/10.1016/j.jmatprotec.2004.01.060
 
DOI https://doi.org/10.1016/j.jmatprotec.2004.01.060
アブストラクト Recently, there are high expectations that electrical-discharge machines will become indispensable equipment for the precise machining of micro-dies and drilling of micro-holes. The authors propose a local actuator module to improve machining accuracy and speed for such applications. The module utilizes electromagnetic force to hold the electrode in mid-air, and then drive it using free to heavy mechanical components. This design realizes a fast frequency response of 200 Hz in each of the X-, Y- and Z-axes directions. In an experiment, it was proven that the module is capable of drilling a micro-hole approximately three times faster than the conventional method while sustaining 10–20% less electrode wear. The module itself is also capable of quick planetary motions for highly accurate machining of micro-dies. These results indicate that the proposed module is practical for improving the micro-machining and more useful for miniaturizing an electrical-discharge machine.

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