Effers of growth conditions and RF plasma on crystalline and electrical properties of SrBi2Ta2O9 thin films grown by liquid delivery MOCVD using a double alcholate(共著)
著者
和文:
T. Jimbo,
H. Sano,
Y. Takahashi,
E. Tokumitsu,
H. Funakubo,
H. Ishiwara.
英文:
T. Jimbo,
H. Sano,
Y. Takahashi,
E. Tokumitsu,
H. Funakubo,
H. Ishiwara.