Role of ultra thin SiOx layer on epitaxial YSZ/SiOx/Si thin film as multi functional buffer layer by nano-probe and in-situ TEM investigation

論文・著書情報

タイトル

和文:
英文:	Role of ultra thin SiOx layer on epitaxial YSZ/SiOx/Si thin film as multi functional buffer layer by nano-probe and in-situ TEM investigation

著者

和文:	Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani.
英文:	Takanori Kiguchi, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani.

言語

English

掲載誌/書名

和文:
英文:	Extended Abstruct of Internatioal Joint Conference on the Application of Ferroelectrics 2002

巻, 号, ページ

No. 31G-TE2-10P pp. 348

出版年月

2002年5月

出版者

和文:
英文:	Extended Abstruct of Internatioal Joint Conference on the Application of Ferroelectrics 2002

会議名称

和文:
英文:

開催地

和文:
英文: