Ab initio Molecular Orbital Study on Hydrogen Radical Addition Reactions to Graphite Surface and Subsequent Initial Surface Process in Silane Plasma Chemical Vapor Deposition
著者
和文:
Kota Sato,
Eiji Shinagawa,
Kenji Nakajima,
Kaori Miyazaki,
Hideomi Koinuma.
英文:
Kota Sato,
Eiji Shinagawa,
Kenji Nakajima,
Kaori Miyazaki,
Hideomi Koinuma.