"We describe filamentary crack-free modification in silica glass and Pyrex glass by CW Laser Backside Irradiation (CW-LBI). In this paper, the properties of laser-induced modification in glasses by CW-LBI were examined. The cross-section of the modification was a concentric ring structure, which consisted of the core region and the clad region. In BF wet etching, the etching rates of the core region, the clad region and the non-irradiated area were 1.6, 3.3 and 1.8μm/h, respectively. Then, a Vickers hardness test showed that the hardness of the core region increased and that of the clad region decreased. Raman spectra of the core region showed that the intensity of the peaks around 490 and 605cm^<-1> were increased and indicated the increase of 4- and 3-fold ring structures in the silica network. On the other hand, 4- and 3-fold ring structures in the clad region decreased. Therefore, the structural changes of silica network had an effect on the change of properties."
各種検索
サポート
ヘルプ