"In this paper, hydrothermal reaction assisted laser process was suggested. Silicon nitride (Si_3N_4) and cubic boron nitride (cBN) were selected as ceramics. Argon ion laser was irradiated to them in water, steam, air, vacuum, argon, and oxygen. Threshold laser power that Si_3N_4 could be processed in water and steam was lower than that in other atmosphere. Removed depth of laser processed single crystal cBN was twice in water and six times in steam as deep as that in air. Hydrothermal reaction was certified by detection of hydrothermal products, such as ammonium and silica ion from Si_3N_4,ammonium and boric ion from cBN. Binder-less sintered cBN was also enhanced by processed in steam."
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