Future ultraprecision machining systems require inprocess monitoring and intelligent machining control functions. This paper presents a newly developed machining process monitoring method. The method proposed aims at monitoring the ultraprecision machining
process using a causal network model of an air spindle system. The results of actual machining experiments confirm that the proposed method can estimate
the dynamic and thermal behaviors at the cutting point during machining. In consequence, the process monitoring method proposed can systematically predict the tool wear, the contact condition between the tool and the workpiece, the abnormal machining conditions, and so on.