Rapid and high sensitive structure evaluation of ferroelectric films using micro-Raman spectroscopy: In-situ observation of stress accumulation and release in PbTiO3 films during first cooling process
著者
和文:
M. Nishide,
M. Matsuoka,
T. Tai,
T. Katoda,
舟窪 浩,
西田 謙,
T. Yamamoto.