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タイトル
和文: 
英文:Surface texture assessment of ultra-precision machined parts based on laser speckle pattern analysis 
著者
和文: 清水 一力, 澤野 宏, 吉岡 勇人, 新野 秀憲.  
英文: Motochika Shimizu, Hiroshi Sawano, Hayato Yoshioka, Hidenori Shinno.  
言語 English 
掲載誌/書名
和文: 
英文:Precision Engineering 
巻, 号, ページ Vol. 38    No. 1    pp. 1-8
出版年月 2014年1月6日 
出版者
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英文: 
会議名称
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開催地
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DOI https://doi.org/10.1016/j.precisioneng.2013.06.005
アブストラクト Surface texture plays an important role in overall product specification, because the surface quality of the product is dominated by the nano-scale surface texture. This paper presents a surface texture assessment method for evaluating roughness and periodicity of surface structure with a laser speckle pattern analysis. By investigating the relation between surface texture and laser speckle pattern, characteristic parameters for describing a laser speckle pattern are proposed. The proposed characteristic parameters can evaluate the surface texture in entire observed area and in limited area in any given direction. Furthermore, the surface texture can be qualitatively assessed with a radar chart of the proposed laser speckle characteristic parameters.

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