電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
英文:
巻, 号, ページ
Vol. 133
No. 8
pp. 330-336
出版年月
2013年8月
出版者
和文:
電気学会
英文:
会議名称
和文:
英文:
開催地
和文:
英文:
アブストラクト
Light-driven actuators result in the miniaturization of micro-devices because such actuators can be driven by a non-contact energy supply. PLZT is a ferroelectric material that exhibits a photostrictive effect. We have succeeded in driving a photoresponse actuator by using the PLZT film. The PLZT film was deposited on a titanium substrate by using the hydrothermal method. The PLZT film was evaluated by x-ray diffraction and piezoelectricity. The actuator has a simple structure in which an indium tin oxide (ITO) transparent electrode is deposited on the surface of the PLZT film. The actuator is driven by the ultraviolet (UV) light. To confirm the driven phenomenon, the photoresponse drive was evaluated by measuring the displacement, electric current and surface temperature. As an example of a light-driven application using the PLZT film actuator, we also fabricated and evaluated a light-driven valve. We have succeeded in changing the flow rate when the intensity of the UV light increased.
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