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タイトル
和文: 
英文:Discussion on Population Kinetics and Number Densities of Excited Species of Low-Pressure Discharge Nitrogen Plasma 
著者
和文: 赤塚洋, 柴田智彦, 根津篤.  
英文: Hiroshi Akatsuka, Tomohiko Shibata, Atsushi Nezu.  
言語 English 
掲載誌/書名
和文: 
英文:IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING 
巻, 号, ページ Vol. 11    Num. S1    pp. S9-S18
出版年月 2016年6月17日 
出版者
和文: 
英文:John Wiley & Sons, Inc. 
会議名称
和文: 
英文: 
開催地
和文: 
英文: 
公式リンク http://onlinelibrary.wiley.com/doi/10.1002/tee.22230/abstract
 
DOI https://doi.org/10.1002/tee.22230
アブストラクト A numerical model is constructed to calculate the number densities of some excited species of nitrogen in low-pressure discharge nitrogen plasma, together with simultaneous solution of the self-consistent electron energy distribution function and N2-vibration distribution function. We consider species N2(X), N2(A), N2(B), N2(C), N2(a), N2(a'), N2+, N4+, N(4S) and e-. In addition to electron collisional reactions, diffusion losses and molecular relations are included. It is found that the ratio of number densities of N2(B) and N2(C) states can be a good measure of the electron kinetic temperature. The N2(C) state is found to be almost in a corona equilibrium, whereas the N2(B) state becomes mainly populated by N2(X, v ≥ 6) + N2(A) reaction and depopulated by collisional relaxation by the ground-state N2(X) molecule.

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