Investigation of bonding strength between (InP, Si)/SiO2 and Si by Surface Activated Bonding based on Fast Atom Beam assisted by Si nano-film

論文・著書情報

タイトル

和文:	Investigation of bonding strength between (InP, Si)/SiO2 and Si by Surface Activated Bonding based on Fast Atom Beam assisted by Si nano-film
英文:	Investigation of bonding strength between (InP, Si)/SiO2 and Si by Surface Activated Bonding based on Fast Atom Beam assisted by Si nano-film

著者

和文:	Fang Weicheng, 王雨寧, 雨宮智宏, 西山伸彦.
英文:	Weicheng Fang, Yuning Wang, Tomohiro Amemiya, Nobuhiko Nishiyama.

言語

Japanese

掲載誌/書名

和文:
英文:

巻, 号, ページ

出版年月

2019年9月

出版者

和文:
英文:

会議名称

和文:	第80回応用物理学会秋季学術講演会
英文:

開催地

和文:
英文: