Carbon dioxide plasmas are widely studied for practical engineering. For example, they are applied to CO2 laser technologies and considered as the decomposition process of CO2 into CO, etc. However, in these plasmas containing CO2 or CO, the excitation kinetics of electronically excited states of the CO molecule are not fully understood yet. In this study, spectroscopic characteristics of the CO Angstrom band in microwave discharge CO2 plasma is investigated, and a discussion comparison the third positive system (3rd PS) of CO. For this purpose, vibrational temperature Tv and rotational temperature Tr of the CO excited states in low-pressure CO2 plasma are investigated. Angstrom band spectra of CO are calculated theoretically as functions of Tv and Tr, after which a fitting is conducted to analyze experimental results. The best theoretical fitting is obtained using two-rotational temperature, a bulk component Tr = 0.04 eV with high energy tail Tr = 0.17 eV, occupying 3/4 and 1/4 fraction of the number density, respectively. For the vibrational temperature Tv≒ 0.4 eV is found as a unique value. From comparing these results with the CO 3rd PS values, it is turned out that there is a difference of 0.11 eV as to the value of Tr.
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