Electron Temperature and Number Density Diagnostics of Low-Pressure Microwave Discharge Helium Plasma by Optical Emission Spectroscopy Based on Collisional Radiative Model
Helium collisional radiative model is simplified and reversely solved to measure electron temperature and density, in which the optical forbidden transitions and some optical allowed transitions are included. The processes that dominate the population flow of levels 31S, 33S, and 31D are examined to obtain a simplified relationship between the population density of these levels and electron number density n_e and temperature T_e. From optical emission spectroscopic measurement, the population density of levels 31S, 33S, and 31D are determined as input parameters of the simplified CR model. Consequently, n_e and T_e results of low-pressure microwave discharge helium plasma are calculated and discussed.
各種検索
サポート
ヘルプ