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タイトル
和文: 
英文:Determination of arbitrary EEDF of atmospheric-pressure plasma by OES continuum emission spectrum analysis 
著者
和文: Van Der Gaag Thijs, 赤塚 洋.  
英文: Thijs Van Der Gaag, Hiroshi Akatsuka.  
言語 English 
掲載誌/書名
和文:2020年第81回応用物理学会秋季学術講演会講演予稿集 
英文:Extended Abstracts of the 81st JSAP Autumn Meeting, 2020 
巻, 号, ページ         p. 07-065
出版年月 2020年8月26日 
出版者
和文:公益社団法人 応用物理学会 
英文:Japan Society of Applied Physics 
会議名称
和文:2020年第81回応用物理学会秋季学術講演会 
英文:The 81st JSAP Autumn Meeting, 2020 
開催地
和文: 
英文: 
公式リンク https://confit.atlas.jp/guide/event/jsap2020a2/subject/11a-Z03-3/tables?cryptoId=
 
アブストラクト New and emerging fields that use atmospheric-pressure non-equilibrium plasma require accessible and easy-to-use diagnostics tools. In this work a new method is presented that is capable of determining arbitrary EEDF from OES measurement. For this, the continuum spectrum is used, which is mostly dominated by neutral bremsstrahlung. The neutral bremsstrahlung emission can be related to the EEDF through an integral equation, from which the EEDF can be obtained by machine learning. This machine learning scheme has been improving steadily and is currently capable of determining detailed EEDF from a realistic OES measurement range with a calculation time in the order of several minutes only. The method presented can potentially become a convenient way of determining arbitrary EEDF in atmospheric-pressure plasma.

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