Developing an optimization algorithm for diagnostic modeling of optical emission spectroscopic measurement of non-equilibrium plasmas based on the argon collisional-radiative model
In this work, an optimization algorithm was proposed for plasma diagnostic modeling based on a statistical analysis of reduced population density distribution. The algorithm generates a diagnostic equation, whose input parameters are the radiant flux of the multi-optical emission lines, and output parameters are electron temperature Te, electron density Ne, and electron energy distribution function (EEDF), based on the dependence of reduced population density on Te, Ne, and EEDF. The argon collisional-radiative model and the generalized EEDF were applied for the analysis of the excitation-kinetics. In this study, the diagnostic error for the low-pressure inductively coupled plasma (ICP), the low-pressure microwave discharge (MWD) surface wave plasma, and the atmospheric dielectric barrier discharge (DBD) plasma were simulated. The simulated diagnostic errors were smaller than those of the previously reported model.
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