Optical emission spectroscopy measurements are performed on the third positive system (3PS) and Ångstrom system bands for microwave discharge CO2 plasma with its discharge pressure of 1 Torr. The molecular vibrational temperature T_v and rotational temperature T_r of CO b and B states are determined as the best fitting parameters. It is found that T_v ~ 0.15 - 0.24 eV and T _r ~ 0.08 − 0.15 eV for the CO b state for the 3PS band. The general fitting of the CO Ångstrom band is difficult with a mono-rotational temperature, whereas two rotational temperatures with bulk component T_r^{bulk} and high-energy tail T_r^{tail} can fit the experimentally observed spectrum with sufficient agreement. It is found that T_v ~ 0.3 − 0.4 eV, T_r^{bulk} ~ 0.03 − 0.04 eV, and T_r^{tail} ~ 0.13 − 0.17 eV for the CO B state. The observed nonequilibrium characteristics are discussed in terms of molecular processes.
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