Although non-equilibrium atmospheric-pressure plasmas are expected to be applied to industries such as medicine and agriculture, there are still many unknowns about their specific basic characteristics. In this experiment, for non-equilibrium atmospheric-pressure Ar plasma, we measured how the discharge current characteristics change by adjusting the frequency of the applied voltage.
As the frequency of the supply voltage was increased, the frequency of the current pulses generated by the atmospheric-pressure discharge also increased, and the frequency dependence was confirmed. It was also found that when the frequency exceeded around 55 kHz, the discharge suddenly became more intense and the current pulses became seven times larger.