Many studies have been reported on the application of atmospheric pressure non-equilibrium
plasma to a wide range of industrial fields. However, practical methods for measuring plasma
parameters such as electron temperature Te, electron density Ne, and particularly, electron energy
distribution function (EEDF) have not yet been established. This presentation reports on optical
emission spectroscopy (OES) method to estimate the EEDF from a continuum analysis based
on the bremsstrahlung theory, a line-spectrum analysis using the collisional radiative model
(CRM), and a hybrid analysis as CRM fitting with the exploratory range restricted by the
continuum analysis.
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