"K. Tsutsui,M. Watanabe,Y. Nakagawa,T. Matsuda,Y. Yoshida,E. Ikenaga,K. Kakushima,P. Ahmet,H. Nohira,T. Maruizumi,A. Ogura,T. Hattori,H. Iwai","New Analysis of Heavily Doped Boron and Arsenic in Shallow Junctions by X-Ray Photoelectron Spectroscopy","the 38th European Solid-State Device Research Conference (ESSDERC2008)",,,,,,2008,Sept. "Kazuo Tsutsui,Masamitsu Watanabe,Yasumasa Nakagawa,Kazunori Sakai,Takayuki Kai,Cheng-Guo Jin,Yuichiro Sasaki,Kuniyuki Kakushima,Parhat Ahmet,Bunji Mizuno,Takeo Hattori,Hiroshi Iwai.","Profiling of Carrier Properties for Shallow Junctions Using a New Sub-nanometer Step-by-step Etching Technique","The 8th International Workshop on Junction Technology (IWJT2008)",,,,,,2008,May "ŽðˆäˆêŒ›,“n糫Œõ,’†ì‹±¬,‹à ¬‘,‰ª‰º ŸŒÈ,²X–Ø—Yˆê˜N,ƒp[ƒ‹ƒnƒbƒgƒAƒwƒƒg,Šp“ˆ–M”V,…–ì •¶“ñ,•ž•”Œ’—Y,“›ˆäˆê¶,Šâˆä—m","‹ÉóÚ‡ƒvƒƒtƒ@ƒCƒŠƒ“ƒO‚Ì‚½‚ß‚Ì”½•œ‹]µŽ_‰»ƒGƒbƒ`ƒ“ƒO‹Zp","t‹G‘æ55‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï","t‹G‘æ55‰ñ‰ž—p•¨—Šw‰ïŠwpu‰‰‰ï—\eW","‰ž—p•¨—Šw‰ï",,"No. 2","pp. 900",2008,Mar.