"’Ñš ‘ņŽĀ,āV–ė G,‹g‰Š —El,V–ė GŒ›","‹C‰t“ņ‘wŠŠ‚É‚æ‚é‹ó‹CÃˆģŽēŽó‚Ė‚„Ŧ‰ŧ","2015”N“xļ–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ï","2015”N“xļ–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ïu‰‰˜_•ķW",,,,"pp. 349-350",2015,Mar. "Takumi Tsumura,Hayato Yoshioka,Hidenori Shinno,Hiroshi Sawano","Magnetically preloaded aerostatic guideway for high speed nanometer positioning",,"Journal of Advanced Mechanical Design, Systems, and Manufacturing","The Japan Society of Mechanical Engineers","Vol. 8","No. 4","pp. 1-11",2014,Oct. "Takumi Tsumura,Hayato Yoshioka,hidenori shinno,sawano hiroshi","Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System","The 7th International Conference on Leading Edge Manufacturing in 21st Century","Proceedings of The 7th International Conference on Leading Edge Manufacturing in 21st Century",,,,,2013,Nov.