"Junnosuke Furuya,Koki Hihara,Kai Fukuchi,Taiki Osawa,Akane Yaida,AKITOSHI OKINO","349 mm linear type atmospheric remote plasma source for large area surface treatment","The 17th International Conference on Electrostatic Precipitation","International Journal of Plasma Environmental Science and Technology",,"Vol. 19","No. 2",,2025,Jan.
"Junnosuke Furuya,Taiki Osawa,Akane Yaida,Nobuhiko Nishiyama,AKITOSHI OKINO","349 mm atmospheric linear type plasma source for 12-inch semiconductor surface processing","The 77th Annual Gaseous Electronics Conference",,,,,,2024,Oct.
"日原弘喜,古谷淳之介,八井田朱音,沖野晃俊,西山伸彦","異種材料集積光回路作製に向けたパーティクルフリーリニア型プラズマによるシリコンウェハの処理","2024年第71回応用物理学会春季学術講演",,,,,,2024,Mar.
"古谷淳之介,日原弘喜,八井田朱音,浦井一,上本道久,沖野晃俊","生体材料を均一処理するためのリニア型マルチガスプラズマ源の開発","生体医歯工学共同研究拠点成果報告会",,,,,,2024,Mar.
"Koki Hihara,Junnosuke Furuya,Akane Yaida,Yusuke Itagawa,Nobuhiro Yoda,Hiroshi Kano,Hajime Urai,Nobuhiko Nishiyama,AKITOSHI OKINO","Development of atmospheric linear type plasma for fabrication of photonic biosensor","The 8th International Symposium on Biomedical Engineering",,,,,,2023,Nov.
"Koki Hihara,Junnosuke Furuya,Akane Yaida,AKITOSHI OKINO,Nobuhiko Nishiyama","Silicon surface treatment by atmospheric large remote plasma for heterogeneous material integration","The 76th Annual Gas Electronics Conference",,,,,,2023,Oct.
"古谷淳之介,日原弘喜,八井田朱音,沖野晃俊","12インチの半導体ウェハを親水化処理するためのリニア型大気圧プラズマ装置の開発","電気学会東京支部カンファレンス学生研究発表会",,,,,,2023,Aug.
"古谷淳之介,日原弘喜,八井田朱音,沖野晃俊","大気圧リニア型プラズマ源による銅板の親水化実験","プラズマ分光分析研究会若手会 第3回講演会",,,,,,2023,July
"古谷淳之介,日原弘喜,八井田朱音,沖野晃俊","コンタミネーションの少ない大気圧リニア型プラズマの開発","プラズマ分光分析研究会筑波セミナー",,,,,,2023,July