"Y. Takamura,H. Nitta,R. Ishido,T. Kaneko,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Research on planar type spiral inductors with facing traget sputtered CoFeB-SiO2 magnetic layers for Power Electronics Circuits","第15回スマートエネルギー技術研究センターシンポジウム〜エネルギーの変換・貯蔵〜",,,,,,2023,Oct. "H. Nitta,Y. Takamura,T. Kaneko,S. Nakagawa","Fabrication and Characterization CoZrO Films Deposited by Facing Targets Reactive Sputtering for Micromagnetic Inductors",,"IEEE Magn. Lett.","IEEE","vol. 14",,"pp. 1-5",2023,Sept. "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB?SiO2 Films With Large Uniaxial Anisotropy by Facing Target Sputtering and its Application to High-Frequency Planar-Type Spiral Inductors",,"IEEE Transactions on Magnetics","IEEE","Vol. 59","Issue 11","pp. 1-4",2023,July "Y. Takamura,H. Nitta,R. Ishido,T. Kaneko,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Simulation and fabrication of planar type spiral inductors with facing target sputtered CoFeB-SiO2 magnetic layers","The First International Symposium on Integrated Magnetics 2023 (iSIM 2023)",,," CP-15",,,2023,May "T. Kaneko,H. Nitta,Y. Takamura,S. Nakagawa","Fabrication and characterization CoZrO films deposited by facing targets reactive sputtering for micro magnetic inductor","The First International Symposium on Integrated Magnetics 2023 (iSIM 2023)",,," CP-20",,,2023,May "Y. Takamura,H. Nitta,K. Kawahara,T. Kaneko,R. Ishido,T. Miyazaki,N. Hosoda,K. Fujisaki,S. Nakagawa","Fabrication of CoFeB-SiO2 films with large uniaxial anisotropic by facing target sputtering and its application to high frequency planar type spiral inductors","Intermag2023","Intermag 2023 Digest Book",," MOA-05",,,2023,May "仁田帆南,金子忠幸,河原和馬,石戸亮祐,宮?達也,細田尚揮,藤?敬介,中川茂樹,高村陽太","対向ターゲット式スパッタで作製したCoFeB-SiO2薄膜を用いた長方形スパイラルインダクタ","令和5年電気学会全国大会",,," 2-095",,,2023,Mar. "金子忠幸,仁田帆南,高村陽太,中川茂樹","反応性対向ターゲット式スパッタ法で作製したCoZrO薄膜における 酸素導入量が磁気特性に与える影響","第46回日本磁気学会学術講演会",,," 08pC-5",,,2022,Sept. "河原和馬,金子忠幸,安田智貴,棚瀬純平,高村陽太,藤崎敬介,中川茂樹","対向ターゲット式スパッタ法による高周波動作用CoZrO 薄膜の作製","第45回日本磁気学会学術講演会","第45 回日本磁気学会学術講演概要集",," 02pC-4",,,2021,Sept.