"H. Akatsuka,S. Watanabe,K. Doi,T. Kiyota,Y. Yamashita,W. Kikuchi,K. Ishi,Y. Ye,A. Nezu","Optical Emission Spectroscopic Measurement of Electron Temperature and Density of Oxygen ICP","The 45th International Symposium on Dry Process (DPS2024)","Proc. DPS2024","International Symposium on Dry Process Organizing Committee",,,"pp. 81-82",2024,Nov. "ŽR‰Ί —Y–η,“y‹ Œͺ‘Ύ,΄“c“NŽi,Š‰Fν,“‡’J˜aŠσ,‰½•Ά““,‰HΆ—zŒό,‹e’nqs,ŸNˆδΚ‹M,ͺ’Γ“Δ,Τ’Λ—m","ƒgƒ‚ƒOƒ‰ƒtƒBƒbƒN”­Œυ•ͺŒυŒv‘ͺ‚ΖƒAƒ‹ƒSƒ“Υ“ΛηtŽΛƒ‚ƒfƒ‹‚Ι‚ΰ‚Ζ‚Γ‚­CF4/O2/Arƒvƒ‰ƒYƒ}‚Μ“dŽq‰·“xE“dŽq–§“xEEEDF‚ΜˆΚ’u•ͺ•zf’f","‘ζ85‰ρ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο","‘ζ85‰ρ‰ž—p•¨—Šw‰οH‹GŠwpu‰‰‰ο u‰‰—vŽ|W","Œφ‰vŽΠ’c–@l ‰ž—p•¨—Šw‰ο",,,,2024,Sept. "Yuya Yamashita,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Wataru Kikuchi,Yuchen Ye,Atsushi Nezu,Hiroshi Akatsuka","Electron temperature diagnosis of CF4/O2 plasma based on fluorine atomic corona model by tomographic optical emission spectroscopic measurement","ESCAMPIG (Europhysics Conference on Atomic and Molecular Physics of Ionized Gases) 2024","Proceedings of ESCAMPIG2024","Department of Plasma Physics and Technology of Masaryk University (MUNI)",,,,2024,July "Yuchen Ye,Kenta Doi,Tetsuji Kiyota,Shuhei Watanabe,Kazuki Shimatani,Ayaki Sakurai,Yuya Yamashita,Wataru Kikuchi,Atsushi Nezu,Hiroshi Akatsuka","Electron Temperature and Density Diagnosis in Argon Dual-Frequency ICP by Tomographic Optical Emission Spectroscopy and Langmuir Probe Measurements","The 41st annual meeting of The Japan Society of Plasma Science and Nuclear Fusion Research","Extended Abstracts of the 41st Annual Meeting of JSPF","The Japan Society of Plasma Science and Nuclear Fusion Research",,,,2024,