"’†‘º—扤“Þ,Œj’q‹B,“¡ìŽüˆê,^•¿‘ìŽi,ˆîì‹M‘å,–ì—SŽq,ŒË‘q˜a","ƒpƒ‹ƒXCO2ƒŒ[ƒU‚ð—p‚¢‚½ƒKƒ‰ƒX”÷׌ŠŒ`¬‹Zp","2013”N“x¸–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ï","2013”N“x¸–§HŠw‰ït‹G‘å‰ïŠwpu‰‰‰ïu‰‰˜_•¶W",,,,"pp. 587-588",2013,Mar. "Tomotaka Katsura,Reona Nakamura,Shinichi Fujikawa,Takuji Magara,Takahiro Inagawa,Yuko Aono,Hitoshi Tokura","High-Speed Drilling Through-Holes in Borosilicate Glass Substrate by High-Peak-Power CO2 Laser","2nd Annual IEEE Global Interposer Technology Workshop 2012",,,,,,2012,Nov.