"Hui-seong Han","A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering",,,,,,,2013,June
"Hui-seong Han","A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering",,,,,,,2013,June
"Hui-seong Han","A study on ultrathin hafnium nitride gate insulator formed by ECR plasma sputtering",,,,,,,2013,June
"Han Hui-Seong,Takahiro Sano,Young uk Song,Shun-ichiro Ohmi","Electrical Properties of Hf/HfSiON/p-Si(100) Structure MIS capacitor by Using ECR-Sputtering","春季第５７回応用物理学関係連合講演会","春季第５７回応用物理学関係連合講演会予稿集","応用物理学会",,,"p. 13-105",2010,Mar.