"Junpei Matsuzaki,Chiemi Ishiyama,Masato Sone,Yakichi Higo","Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in three types of SU-8",,"Microelectronic Engineering",,"Vol. 110C",,"pp. 108-111",2013,June
"Junpei Matsuzaki,Chiemi Ishiyama,Masato Sone,Yakichi Higo","Effects of Chemical Components on the Bending Properties of Micro-sized Cantilevers in SU-8","38th International Conference on Micro and Nano Engineering, (MNE2012)","38th International Conference on Micro and Nano Engineering, (MNE2012)",,,,"pp. P067-276",2012,Sept.
"ΞŽR ηŒb”ό,Όθ ƒ•½,‘]ͺ ³l,”μŒγ –ξ‹g","MEMS—pƒtƒHƒgƒŒƒWƒXƒg‚Μƒ}ƒCƒNƒƒTƒCƒY‹Θ‚°“Α«‚Ι‹y‚Ϊ‚·˜IŒυ—Κ‚Μ‰e‹Ώ","‘ζ55‰ρ‚•ͺŽq“’˜_‰ο","‘ζ55‰ρ‚•ͺŽq“’˜_‰ο—\eW",,,,"pp. 1H14",2006,Sept.