"ICHIRO HAGIWARA,Hua Wei Chen,Jiang D.H.","Development of Novel XY Micropositioning Stage",,"Key Engineering Materials",,"Vol. 408-409",,"page 103-106,",2009, "ICHIRO HAGIWARA,Hua Wei Chen","Novel Precision PZT-driven Micropositioning Stage with Large Travel Range",,"Key Engineering Materials",,"Vol. 408-409",,"page 159-162",2009,