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"Naoki Wakiya,Takeshi Kitayama,Naonori Sakamoto,Hisao Suzuki,Teiko Kadowaki,keisuke fujito,Hidemitsu Takaoka,Akira Osada,TAKANORI KIGUCHI,Kazuo Shinozaki","Control of poly-type and mechanical properties of Al<sub>2</sub>O<sub>3</sub> film prepared by pulsed laser deposition and rf magnetron sputtering","The IUMRS International Conference in Asia 2008","The IUMRS International Conference in Asia 2008",,,"# IO-6","p. 73",2008,Dec.